| The table below summarizes the specifications of TEMPO 1D (for measuring out-of-plane displacement) and TEMPO 2D (for simultaneously measuring in-plane and out-of-plane displacement). |
| |
Specifications |
TEMPO 1D (Out-of-plane Z) |
TEMPO 2D (In-Plane X & Out-of-plane Z) |
NESD (Noise Equivalent Surface Displacement) |
2. 10-7 nm (W/Hz) 1/2 |
2. 10-7 nm (W/Hz) 1/2 out-of-plane
|
| 4. 10-7 nm (W/Hz) 1/2 in-plane |
Detection Bandwidth Upper limit
|
20 MHz, 125 MHz or 1 GHz |
20 MHz |
Detection Bandwidth Lower limit |
100 kHz or 1 MHz |
20 KHz |
Photorefractive low frequency cut-off |
100 Hz (1kHz with compensation on)
|
100 Hz (1kHz with compensation on) |
Spot
diameter on sample |
10 micron or 75 micron (f=100mm) |
75 micron (f=40mm) |
Optical
stand-off |
From 100 mm to 500 mm |
From 40 mm to 100mm |
Diameter of collecting aperture |
2" (~ 50mm) |
2" (~ 50mm) |
Depth of focus |
from 0.5 mm to 50 mm |
From 0.25 mm to 0.5 mm |
Focusing |
Motorized and controllable by USB port |
Motorized and controllable by USB port
|
Analog OUTPUTS |
AC signal (Full bandwidth) |
Calibrated AC signal (1MHz - 90 MHz) |
DC Level |
Calibration Level |
|
Calibrated AC signal (OUT-OF-PLANE) |
Calibrated AC signal (IN-PLANE) |
DC Level |
Error |
|
Suitable laser power |
150 mW to 500 mW (internal) - Up to 15 W external |
150 mW to 500 mW (internal) - Up to 15 W external |
Electrical requirement |
110/220 V, 50/60 Hz |
110/220 V, 50/60 Hz |
| Dimensions / Weight |
495mm x 305mm x 114mm - - 20 kg |
495mm x 305mm x 114mm - 20 kg |
OPTIONS |
2D scanning set-up including PC, software, digitalization card and X-Y translations |
2D scanning set-up including PC, software, digitalization card and X-Y translations |
